my %args = (
    eqpid      => $eqpid, 
    chamber    => $chamber, 
    lotid      => $lotid, 
    wafer_flow => $wafer_flow, 
    recipe     => $recipe, 
    wafer_slot => wafer_slot,
    # etc.
);

sub_call(%args);

sub sub_call {
    my %args = shift;

    # do some validation

    # do some work
}
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The advantage is that no one (including you) who comes in later has to remember parameter order in the call. The actual structure is sitting right there in the open, and the code is much more self-documenting.